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Surface-micromachined 2D optical scanners with optically flat single-crystalline silicon micromirrors

Author(s):
Publication title:
Silicon-based and Hybrid Optoelectronics III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4293
Pub. Year:
2001
Page(from):
46
Page(to):
53
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439710 [0819439711]
Language:
English
Call no.:
P63600/4293
Type:
Conference Proceedings

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