Nanometer precision robot for active photonics alignment using INCHWORM motors

Nanometer precision robot for active photonics alignment using INCHWORM motors

Author(s):

Henderson,D.A. ( Burleigh Instruments, Inc. )
Ragona,S.P.

Publication title:

Optoelectronic Integrated Circuits and Packaging V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4290

Pub. Year:

2001

Page(from):

136

Page(to):

144

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819439680 [0819439681]

Language:

English

Call no.:

P63600/4290

Type:

Conference Proceedings

Details

TDL ID:	ZA00012006
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Optoelectronic integrated circuits and packaging
Conf. info. (Number):	2001 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2001.01.24-2001.01.26

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