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Process development of fast and sensitive polySiGe microbolometer arrays

Author(s):
Publication title:
Photodetectors : materials and devices VI : 22-24 January 2001, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4288
Pub. Year:
2001
Page(from):
94
Page(to):
99
Pages:
6
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439666 [0819439665]
Language:
English
Call no.:
P63600/4288
Type:
Conference Proceedings

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