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Four-function optical switch with LIGA alignment plates

Author(s):
Kemme,S.A. ( Sandia National Labs. )
Spahn,O.B.
Christenson,T.R.
Sweatt,W.C.
Wendt,J.R.
Peters,D.W.
Carter,T.R.
Samora,S.
3 more
Publication title:
Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4284
Pub. Year:
2001
Page(from):
10
Page(to):
16
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439628 [0819439622]
Language:
English
Call no.:
P63600/4284
Type:
Conference Proceedings

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