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"New combinatorial experimental method for preparation of PZT thin films from Pb, Zr, and Ti metal organic chemical sauces"

Author(s):
Publication title:
Combinatorial and composition spread techniques in materials and device development II : 22-23, 25 January, 2001, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4281
Pub. Year:
2001
Page(from):
27
Page(to):
35
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439598 [0819439592]
Language:
English
Call no.:
P63600/4281
Type:
Conference Proceedings

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