Blank Cover Image

Silicon as a substrate in multiwafer MOVPE GaN technology

Author(s):
Alam,A. ( AIXTRON AG )
Schineller,B.
Protzmann,H.
Lunenburger,M.
Heuken,M.
Bremser,M.D.
Woelk,E.
Dadgar,A.
Krost,A.
4 more
Publication title:
Light-Emitting Diodes: Research, Manufacturing, and Applications V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4278
Pub. Year:
2001
Page(from):
158
Page(to):
164
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439567 [0819439568]
Language:
English
Call no.:
P63600/4278
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Highly efficient InGaN/GaN MQW for blue- and green-light-emitting structures grown in production MOVPE reactors

Bremser,M.D., Luenenbuerger,M., Protzmann,H., Heuken,M.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings GaN Production Transfer From Single Wafer Equipment to Planetary Reactors

Schineller, B., Schoen, O., Protzmann, H., Luenenbuerger, M, Alam, A., Ileuken, M., Juergensen, H.

Electrochemical Society
2 Conference Proceedings Reproducibility and uniformity of MOVPE planetary reactors(R) for the growth of GaN based materials

Heuken, M., Protzmann, H., Schoen, O., Luenenbuerger, M., Juergensen, H., Bremser, M., Woelk, E.

MRS-Materials Research Society
8 Conference Proceedings Uniformity of GaInAsP/GaInAsP multiquantum well structures grown in multiwafer reactors

Deufel,M., Heuken,M., Beccard,R., Juergensen,H., Woelk,E.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Multiwafer MOVPE of III-Nitride Films for LED and Laser Applications

Beccard, R., Schoen, O., Schineller, B., Schmitz, D., Heuken, M., Jurgensen, H.

MRS - Materials Research Society
9 Conference Proceedings Production scale MOVPE reactors for electronic and optoelectronic applications

Protzmann, H., Gerstenbrandt, G., Alam, A., Schoen, O., Luenenbuerger, M., Dikme, Y., Kalisch, H., Jansen, R.H., Heuken, …

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Ternary Group-III Nitrides Grown in MOVPE Production Reactors

Schoen, O., Protzmann, H., Schwambera, M., Schineller, B., Heuken, M., Schmitz, D., Strauch, G., Juergensen, H.

MRS - Materials Research Society
10 Conference Proceedings InGaN/GaN violet-blue multiple quantum well heterostructure lasers for temperature range of 80-450 K

Schineller, B., Protzmann, H., Luenenbuerger, M., Gerstenbrandt, G., Heuken, M., Lutsenko, E.V., Zubialevich, V.Z., …

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Spectral-angular and threshold characteristics of ultraviolet-blue In(Al)GaN/GaN/AI2O3 heterostructure lasers

Yablonskii, G.P., Lutsenko, E.V., Zubialevich, V.Z., Pavlovskii, V.N., Marko, I.P., Gurskii, A.L., Alam, A., Protzmann, …

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Multiwafer MOCVD Systems for Ferroelectrics

Deschler, M., Woelk, E., Schmitz, D., Strauch, G., Juergensen, H.

Electrochemical Society
6 Conference Proceedings Uniformity control of 3-inch GaN/InGaN layers grown in planetary reactors(R)

Protzmann, H., Luenenbuerger, M., Bremser, M., Heuken, M., Juergensen, H.

MRS-Materials Research Society
12 Conference Proceedings Optically pumped transverse lasers based on ZnMgSSe/ZnSe and InGaN/GaN heterostructures

Lutsenko, E.V., Zubialevich, V.Z., Pavlovskii, V.N., Marko, I.P., Gurskii, A.L., Yablonskii, G.P., Kalisch, H., Walther, …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12