Field-test results of an image retrieval system for semiconductor yield learning
- Author(s):
Karnowski,T.P. ( Oak Ridge National Lab. ) Tobin Jr.,K.W. Arrowood,L.F. Ferrell,R.K. Goddard Jr.,J.S. Lakhani,F. - Publication title:
- Metrology-based Control for Micro-Manufacturing
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4275
- Pub. Year:
- 2001
- Page(from):
- 41
- Page(to):
- 52
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439536 [0819439533]
- Language:
- English
- Call no.:
- P63600/4275
- Type:
- Conference Proceedings
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