Integrated applications of inspection data in the semiconductor manufacturing environment
- Author(s):
- Tobin Jr.,K.W. ( Oak Ridge National Lab. )
- Karnowski,T.P.
- Lakhani,F.
- Publication title:
- Metrology-based Control for Micro-Manufacturing
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4275
- Pub. Year:
- 2001
- Page(from):
- 31
- Page(to):
- 40
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439536 [0819439533]
- Language:
- English
- Call no.:
- P63600/4275
- Type:
- Conference Proceedings
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