High-resolution 157-nm laser micromachining of polymers

High-resolution 157-nm laser micromachining of polymers

Author(s):

Publication title:

Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4274

Pub. Year:

2001

Page(from):

158

Page(to):

167

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819439529 [0819439525]

Language:

English

Call no.:

P63600/4274

Type:

Conference Proceedings

Details

TDL ID:	ZA00011990
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Laser applications in microelectronic and optoelectronic manufacturing
Conf. info. (Number):	2001 : 6th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2001.01.22-2001.01.24

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