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State-of-the-art ultrasonic micromotors and their future applications

Author(s):
Publication title:
Smart electronics and MEMS II : 13-15 December 2000, Melbourne, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4236
Pub. Year:
2000
Page(from):
330
Page(to):
338
Pages:
9
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439109 [081943910X]
Language:
English
Call no.:
P63600/4236
Type:
Conference Proceedings

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