Optimized layout generator for microgyroscope
- Author(s):
- Publication title:
- Micromachining and Microfabrication
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4230
- Pub. Year:
- 2000
- Page(from):
- 119
- Page(to):
- 127
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439024 [0819439029]
- Language:
- English
- Call no.:
- P63600/4230
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Mathematical modeling on the quadrature error of low-rate microgyroscope for aerospace applications
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
4
Conference Proceedings
Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Electromechanical analysis of microelectromechanical structures and dynamic simulations of laterally vibratory microgyroscope
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |