Tools and processes for MEMS and nanotechnology
- Author(s):
- Publication title:
- Micromachining and Microfabrication
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4230
- Pub. Year:
- 2000
- Page(from):
- 1
- Page(to):
- 9
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439024 [0819439029]
- Language:
- English
- Call no.:
- P63600/4230
- Type:
- Conference Proceedings
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