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Design considerations in micromachined silicon microphones

Author(s):
Miao,J.
Lin,R.
Chen,L.
Zou,Q.
Lim,S.Y.
Seah,S.H.
1 more
Publication title:
Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4228
Pub. Year:
2000
Page(from):
309
Page(to):
314
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439000 [0819439002]
Language:
English
Call no.:
P63600/4228
Type:
Conference Proceedings

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