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Fabrication of diffractive micro-optical lens for integration with optoelectronic devices by direct laser writing

Author(s):
Publication title:
Microlithographic Techniques in Integrated Circuit Fabrication II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4226
Pub. Year:
2000
Page(from):
69
Page(to):
76
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438980 [0819438987]
Language:
English
Call no.:
P63600/4226
Type:
Conference Proceedings

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