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CVD diamond microhinge for MOEMS applications

Author(s):
Publication title:
Instruments for optics and optoelectronic inspection and control, 8-10 November 2000, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4223
Pub. Year:
2000
Page(from):
61
Page(to):
64
Pages:
4
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438942 [0819438944]
Language:
English
Call no.:
P63600/4223
Type:
Conference Proceedings

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