Preparation and properties of titanium oxide thin film by midfrequency alternative reactive magnetron sputtering technique

Preparation and properties of titanium oxide thin film by midfrequency alternative reactive magnetron sputtering technique

Author(s):

Publication title:

Advanced photonic sensors : Technology and applications, 8-10 Novenber 2000, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4220

Pub. Year:

2000

Page(from):

34

Page(to):

38

Pages:

5

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819438911 [081943891X]

Language:

English

Call no.:

P63600/4220

Type:

Conference Proceedings

Details

TDL ID:	ZA00011939
Series ID:	PA00000029
Conf. info. (Name):	Optics and Optoelectronic Inspection and Control : Advanced photonic sensors : Technology and applications
Conf. info. (Number):	2000
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2000.11.08-2000.11.10

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