Impacting Device Performance and Yield Through Sacrificial Oxidation Improvements
- Author(s):
- Publication title:
- High Purity Silicon VI : proceedings of the sixth International Symposium
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4218
- Pub. Year:
- 2000
- Page(from):
- 467
- Page(to):
- 474
- Pages:
- 8
- Pub. info.:
- Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9781566772846 [1566772842]
- Language:
- English
- Call no.:
- P63600/4218
- Type:
- Conference Proceedings
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