Blank Cover Image

Micro-Fluctuation of Growth-Rate and Grown-in Defect Distribution in Cz-Si

Author(s):
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4218
Pub. Year:
2000
Page(from):
54
Page(to):
65
Pages:
12
Pub. info.:
Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
P63600/4218
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Micro-Fluctuation of Growth-Rate and Grown-in Defect Distribution in Cz-Si

Hasabe, M., Fukuda, J., Iwasaki, T., Harada, H., Tanaka, M.

Electrochemical Society
7 Conference Proceedings DISTRIBUTION OF GROWN-IN CRYSTAL DEFECTS FORMED BY POINT DEFECT DIFFUSION

Habu, R., Tomiura, A., Harada, H.

Electrochemical Society
2 Conference Proceedings Influence of Point Defect Concentration in Growing CZ-Si on the Formation Temperature of the Defects Affecting Gate Oxide Integrity

Iwasaki,T., Harada,H., Haga,H.

Trans Tech Publications
8 Conference Proceedings Properties of large CaF2 crystals grown by CZ method for lens materials

Yanagi, H., Nawata, T., Inui, Y., Hatanaka, Y., Nishijima, E., Fukuda, T.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Crystallographic Analysis of Flow Pattern Defects in Dislocated Czchralski Silicon Crystals

Ikematsu, Y., Iwasaki, T., Harada, H., Tanaka, K., Fujinami, M., Hasebe, M.

MRS - Materials Research Society
9 Conference Proceedings Electrical Properties of Iron-Related Defects in CZ- and FZ-Grown n-Type Silicon

Kitagawa, H., Tanaka, S.

MRS - Materials Research Society
4 Conference Proceedings The Formation of Defects Degrading Gate Oxide Integrity During CZ-Si Crystal Growth

Tsumori, Y., Nakai, K., Iwasaki, T., Haga, H., Kojima, K., Nakashizu, T.

MRS - Materials Research Society
10 Conference Proceedings An Investigation of Cavity Growth Rate in Superplastic Al and Mg Alloys

Mabuchi, M., Chino, Y., Iwasaki, H.

Trans Tech Publications
5 Conference Proceedings Control of grown-in defects in nitrogen-doped CZ silicon crystal for new generation devices

Hourai, M., Ono, T., Umeno, S., Tanaka, T., Asayaoia, E., Nishikawa, H., Sano, M., Tsuya, H.

Electrochemical Society
11 Conference Proceedings Challenges of 4H-SiC MOSFETs on the C(000-1) Face toward the Achievement of Ultra Low On-Resistance

K. Fukuda, S. Harada, J. Senzaki, M. Okamoto, Y. Tanaka

Trans Tech Publications
6 Conference Proceedings Relationship between Grown-in Defects and Thermal History during CZ Si Crystal Growth

Takano,K., Kitagawa,K., Iino,E., Kimura,M., Yamagishi,H.

Trans Tech Publications
12 Conference Proceedings INFLUENCE OF COOLING CONDITION DURING CRYSTAL GROWTH OF CZ-Si ON OXIDE BREAKDOWN PROPERTY

Iwasaki, T., Tsumori, Y., Nakai, K., Haga, H., Kojima, K., Nakashizu, T.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12