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Advanced Silicon Wafers for 0.18 μm Design Rule and Beyond: Epi and fFLASH!

Author(s):
Schmolke,R.
Blietz,M.
Schauer,R.
Zemke,D.
Oelkrug,H.
Ammon,W.v.
Lambert,U.
Graf,D.
3 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4218
Pub. Year:
2000
Page(from):
3
Page(to):
18
Pages:
16
Pub. info.:
Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
P63600/4218
Type:
Conference Proceedings

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