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Design flow for MOEMS

Author(s):
Publication title:
Optomechanical engineering 2000 : 7-8 November 2000, Boston, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4198
Pub. Year:
2000
Page(from):
55
Page(to):
62
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438638 [0819438634]
Language:
English
Call no.:
P63600/4198
Type:
Conference Proceedings

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