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High-Precision surface profiling with broadband accordion fringe interferometry

Author(s):
Publication title:
Machine vision and three-dimensional imaging systems for inspection and metrology : 6-8 November 2001 [i.e. 2000], Boston, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4189
Pub. Year:
2000
Page(from):
161
Page(to):
169
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438546 [0819438545]
Language:
English
Call no.:
P63600/4189
Type:
Conference Proceedings

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