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Establishment of production process and assurance method for alternating phase-shift masks

Author(s):
Murai,S.M.
Koizumi,Y.
Kamibayashi,T.
Saitou,H.
Hoga,M.
Morikawa,Y.
Miyashita,H.
2 more
Publication title:
20th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
Pub. Year:
2000
Page(from):
890
Page(to):
901
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
Language:
English
Call no.:
P63600/4186
Type:
Conference Proceedings

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