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Evaluation of photomask blanks layer parameters with an x-ray reflection method and photomask property distribution

Author(s):
Hirano,T.
Hayashi,A.
Hino,Y.
Wada,H.
Otaki,M.
Matsuo,R.
1 more
Publication title:
20th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
Pub. Year:
2000
Page(from):
522
Page(to):
531
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
Language:
English
Call no.:
P63600/4186
Type:
Conference Proceedings

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