Blank Cover Image

Balancing of alternating phase-shifting masks for practical application: modeling and experimental verification

Author(s):
Griesinger,U.A.
Mader,L.
Semmler,A.
Dettmann,W.
Noelscher,C.
Pforr,R.
1 more
Publication title:
20th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
Pub. Year:
2000
Page(from):
372
Page(to):
383
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
Language:
English
Call no.:
P63600/4186
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings "Alternating phase-shifting mask application: effect of width and geometry of shifters, 3D EMF simulation and experimental verification"

Semmler,A., Elsner,A., Koehle,R., Mader,L., Pforr,R., Noelscher,C., Friedrich,C.M., Knobloch,J., Griesinger,U.A.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Alternating phase-shifting masks: phase determination and impact of quartz defects- theoretical and experimental results

Griesinger, U.A., Dettmann, W., Hennig, M., Heumann, J.P., Koehle, R., Ludwig, R., Verbeek, M., Zarrabian, M.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Application of 3D EMF simulation for development and optimization of alternating phase-shifting masks

Semmler,A., Mader,L., Elsner,A., Koehle,R., Griesinger,U.A., Noelscher,C.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Introduction of full-level alternating phase-shift mask technology into IC manufacturing

Thiele, J., Ahrens, M., Dettmann, W., Heissmeier, M., Hennig, M., Ludwig, B., Moukara, M., Pforr, R.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Transmission and phase balancing of alternating phase-shifting masks(5X):theoretical and experimental results

Griesinger,U.A., Pforr,R., Knobloch,J., Friedrich,C.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings Contact layer printing using alternating phase-shifting masks: mask making, patterning results, and production implementation

Pforr, R., Dettmann, W., Eisenhut, M., Hennig, M., Hofmann, D., Thiele, J., Thielscher, G.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Defect printability and repair of alternating phase-shift masks

Friedrich,C., Verbeek,M., Mader,L., Crell,C., Pforr,R., Griesinger,U.A.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Image performance and mask characterization of 157-nm alternating phase-shifting mask

Chen, Y.-T., Meute, J., Dean, K.R., Stark, D.R., Schilz, C.M., Dettmann, W., Koehle, R., Schiessl, B., Degel, W.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Evaluating the potential of alternating phase-shift masks using lithography simulation

Friedrich,C., Ergenzinger,K., Gans,F., Crassmann,A., Griesinger,U.A., Knobloch,J., Mader,L., Maurer,W., Pforr,R.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Phase defect inspection of 130-nm node phase-shift masks using a simultaneous transmitted and reflected light pattern inspection algorithm

Zurbrick,L.S., Emery,D., Rudzinski,M.W., Wihl,M.J., Prudhomme,M., Crell,C., Griesinger,U.A., Vorwerk,M., Hennig,M.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Optimizing edge topography of alternating phase-shift masks using rigorous mask modeling

Friedrich,C., Mader,L., Erdmann,A., List,S., Gordon,R.L., Kalus,C.K., Griesinger,U.A., Pforr,R., Mathuni,J., Ruhl,G.G., …

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Proximity effects of alternating phase-shift masks

Maurer,W., Friedrich,C., Mader,L., Thiele,J.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12