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Pellicle-induced distortions in advanced optical reticles

Author(s):
Semke,W.H.
Siewert,L.K.
Mikkelson,A.R.
Risius,E.A.
Tang,N.
Engelstad,R.L.
Lovell,E.G.
Zheng,J.-F.
Dao,G.T.
4 more
Publication title:
20th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
Pub. Year:
2000
Page(from):
207
Page(to):
216
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
Language:
English
Call no.:
P63600/4186
Type:
Conference Proceedings

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