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Subresolution process windows and yield estimation technique based on detailed full-chip CD simulation

Author(s):
Granik,Yu.
Cobb,N.B.
Sahouria,E.Y.
Toublan,O.
Capodieci,L.
Socha,R.J.
1 more
Publication title:
Process Control and Diagnostics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4182
Pub. Year:
2000
Page(from):
335
Page(to):
341
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438430 [081943843X]
Language:
English
Call no.:
P63600/4182
Type:
Conference Proceedings

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