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Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool

Author(s):
Boher,P.
Pickering,C.
Tarnowka,A.
Piel,J.-P.
Evrard,P.
Stehle,J.-L.P.
1 more
Publication title:
Process Control and Diagnostics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4182
Pub. Year:
2000
Page(from):
115
Page(to):
123
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438430 [081943843X]
Language:
English
Call no.:
P63600/4182
Type:
Conference Proceedings

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