Rapid x-ray reflectometry (XRR) metrology applied to Cu/low-k damascene process development

Rapid x-ray reflectometry (XRR) metrology applied to Cu/low-k damascene process development

Author(s):

Publication title:

Process Control and Diagnostics

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4182

Pub. Year:

2000

Page(from):

106

Page(to):

114

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819438430 [081943843X]

Language:

English

Call no.:

P63600/4182

Type:

Conference Proceedings

Details

TDL ID:	ZA00011901
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Process control and diagnostics
Conf. info. (Number):	2000
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2000.09.18-2000.09.19

Similar Items:

1 Conference Proceedings Microstructure and Texture of Electroplated Copper in Damascene Structures Gross, M. E., Lingk, C., Siegrist, T., Coleman, E., Brown, W. L., Ueno, K., Tsuchiya, Y., Itoh, N., Ritzdorf, T., … MRS - Materials Research Society	7 Conference Proceedings Electroplated Damascene Copper: Process Influences on Recrystallization and Texture Barr, D., Brown, W. L., Drese, R., Evans-Lutterodt, K., Golovin, D., Graham, L., Gross, M. E., Lingk, C., Ritzdorf, T., … Materials Research Society
2 Conference Proceedings Integration of Cu Aand Low-k Material For Dual-Damascene Process* Jang, S.M., Jeng, S.M., Chang, W., Li, L.J., Lin, C.C., Yu, C.H., Liang, M.S. Electrochemical Society	8 Conference Proceedings Length Effects On The Reliability Of Dual-Damascene Cu Interconnects Wei, F., Gan, C.L., Thompson, C.V., Clement, J.J., Hau-Riege, S.P., Pey, K.L., Choi, W.K., Tay, H.L., Yu, B., … Materials Research Society
3 Conference Proceedings Evaluation of alignment target designs for Cu and low-K dual damascene processes Mukherjee-Roy, M., Singh, N., Mehta, S.S., Chik, W.M., Sim, C.T., Cheong, F. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Rapid x-ray reflectivity (XRR) characterization and process monitoring of multilayer Ta/Al2O3/Ta/SiO2/Si Leng,J., Opsal,J.L. SPIE-The International Society for Optical Engineering
4 Conference Proceedings RAPID THERMAL PROCESSING: A BIBLIOGRAPHY Powell, R.A., Manion, M.L. Materials Research Society	10 Conference Proceedings The Application of X-ray Metrology for Rapid Development of High-κ Dielectrics P. Hung, T. Böscke, M. Wormington, D.K. Bowen, P. Lysaght Electrochemical Society
5 Conference Proceedings Characterization of High-k Dielectrics by Combined Spectroscopic Ellipsometry (SE) and X-Ray Reflectometry (XRR) Sun, L., Defranoux, C., Stehle, J. L., Boher, P., Evrard, P., Bellandi, E., Bender, H. Materials Research Society	11 Conference Proceedings Application of scatterometry for CD and profile metrology in 193-nm lithography process development Chen, L.-J., Ke, C.-M., Yu, S.S., Gau, T.-S., Chen, P., Ku, Y.-C., Lin, B.J., Engelhard, D., Hetzer, D., Yang, J.Y., … SPIE-The International Society for Optical Engineering
6 Conference Proceedings Electroplated Damascene Copper: Process Influences on Recrystallization and Texture Gross, M. E., Drese, R., Lingk, C., Brown, W. L., Evans-Lutterodt, K., Barr, D., Golovin, D., Ritzdorf, T., Turner, J., … MRS - Materials Research Society	12 Conference Proceedings Development process of automotive microsensors W.C. Tang Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12