Effects of advanced illumination schemes on design manufacturability and interactions with optical proximity corrections
- Author(s):
Capodieci,L. Torres,J.A. Socha,R.J. Hollerbach,U. Chen,J.F. Os,C.van Granik,Yu. Toublan,O. Cobb,N.B. - Publication title:
- Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4181
- Pub. Year:
- 2000
- Page(from):
- 58
- Page(to):
- 67
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438423 [0819438421]
- Language:
- English
- Call no.:
- P63600/4181
- Type:
- Conference Proceedings
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