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Effects of advanced illumination schemes on design manufacturability and interactions with optical proximity corrections

Author(s):
Capodieci,L.
Torres,J.A.
Socha,R.J.
Hollerbach,U.
Chen,J.F.
Os,C.van
Granik,Yu.
Toublan,O.
Cobb,N.B.
4 more
Publication title:
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4181
Pub. Year:
2000
Page(from):
58
Page(to):
67
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438423 [0819438421]
Language:
English
Call no.:
P63600/4181
Type:
Conference Proceedings

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