Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures

Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures

Author(s):

White,C.D.

Publication title:

MEMS Reliability for Critical Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4180

Pub. Year:

2000

Page(from):

91

Page(to):

95

Pages:

5

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819438362 [0819438367]

Language:

English

Call no.:

P63600/4180

Type:

Conference Proceedings

Details

TDL ID:	ZA00011899
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : MEMS reliability for critical applications
Conf. info. (Number):	2000
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2000.09.20

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