Bulk micromachining for sensors and actuators

Bulk micromachining for sensors and actuators

Author(s):: Esashi,M.
Publication title:: MEMS Reliability for Critical Applications
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 4180
Pub. Year:: 2000
Page(from):: 6
Page(to):: 15
Pages:: 10
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819438362 [0819438367]
Language:: English
Call no.:: P63600/4180
Type:: Conference Proceedings

Details

TDL ID:	ZA00011899
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : MEMS reliability for critical applications
Conf. info. (Number):	2000
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2000.09.20

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