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Fabrication technologies for micro-optical elements with arbitrary surfaces

Author(s):
Schilling,A.
Nussbaum,Ph.
Philipoussis,I.
Herzig,H.P.
Stauffer,L.
Rossi,M.
Kley,E.-B.
2 more
Publication title:
Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4179
Pub. Year:
2000
Page(from):
65
Page(to):
72
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438355 [0819438359]
Language:
English
Call no.:
P63600/4179
Type:
Conference Proceedings

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