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Fabrication of the moving liquid mirror (MLM) spatial light modulator in a standard CMOS process

Author(s):
Wolter,A.
Lakner,H.
Kuck,H.
Doleschal,W.
Kirstein,K.-U.
Rieck,A.
Frohberg,K.
2 more
Publication title:
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4178
Pub. Year:
2000
Page(from):
246
Page(to):
254
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438348 [0819438340]
Language:
English
Call no.:
P63600/4178
Type:
Conference Proceedings

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