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MEMS feedback control using through-wafer optical device monitoring

Author(s):
Publication title:
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4178
Pub. Year:
2000
Page(from):
221
Page(to):
231
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438348 [0819438340]
Language:
English
Call no.:
P63600/4178
Type:
Conference Proceedings

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