Bulk micromachining for sensors and actuators
- Author(s):
- Esashi,M.
- Publication title:
- MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4178
- Pub. Year:
- 2000
- Page(from):
- 6
- Page(to):
- 15
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438348 [0819438340]
- Language:
- English
- Call no.:
- P63600/4178
- Type:
- Conference Proceedings
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