Low-power micromachined structures for gas sensors with improved robustness
- Author(s):
Gracia,I. Gotz,A. Plaza,J.A. Cane,C. Roetsch,P. Bottner,H. Seibert,K. - Publication title:
- Micromachined Devices and Components VI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4176
- Pub. Year:
- 2000
- Page(from):
- 253
- Page(to):
- 263
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438324 [0819438324]
- Language:
- English
- Call no.:
- P63600/4176
- Type:
- Conference Proceedings
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