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Investigation of thermopile using CMOS compatible process and front-side Si bulk etching

Author(s):
Publication title:
Micromachined Devices and Components VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4176
Pub. Year:
2000
Page(from):
168
Page(to):
178
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438324 [0819438324]
Language:
English
Call no.:
P63600/4176
Type:
Conference Proceedings

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