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Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators

Author(s):
Allen,P.B.
Boydston,N.C.
Howard,J.T.
Ko,S.Y.
Kolesar,E.S.
Ruff,M.D.
Wilken,J.M.
Wilks,R.J.
3 more
Publication title:
Micromachined Devices and Components VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4176
Pub. Year:
2000
Page(from):
148
Page(to):
158
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438324 [0819438324]
Language:
English
Call no.:
P63600/4176
Type:
Conference Proceedings

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