Blank Cover Image

Dual beam-mass structure gyroscope micromachined by deep RIE process

Author(s):
Publication title:
Micromachined Devices and Components VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4176
Pub. Year:
2000
Page(from):
74
Page(to):
81
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438324 [0819438324]
Language:
English
Call no.:
P63600/4176
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Composite cantilever beam-mass structure gyroscope by a novel etching technology

Li,X., Bao,M., Yang,H., Shen,S., Wang,W.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Dual-atomic-beam matter-wave gyroscope

Gustavson,T.L., Bouyer,P., Kasevich,M.A.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Phase detection scheme of vibratory gyroscope by 2D driving operation

Yang, H., Bao, M., Yin, H., Shen, S., Xiong, B.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Deep RIE Process For Silicon Carbide Power Electronics And MEMS

Beheim, Glenn, Salupo, Carl S.

Materials Research Society
3 Conference Proceedings Experiments and a new model on damping in rare air

Yin, H., Bao, M., Yang, H., Shen, S., Xiong, B.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Micromachined resonant gyroscope

Qiu, A., Wang, S., Zhou, B.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Singl-sided multilevel structure for silicon pressure transducers by masked-maskless etching technology

Yang,H., Ren,J., Bao,M., Shen,S.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Deep ion-beam lithography for micromachining applications

Springham,S.V., Osipowicz,T., Sanchez,J.L., Lee,S., Watt,F.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process

Ruan, A.Y., Tse, M.S., Chong, G.Y.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings PMMA deep etching by O2RIE

Yu,A., Ding,G., Guo,X., Li,C., Mao,H., Ni,Z.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings STRUCTURE OF Al-N FILMS DEPOSITED BY A QUANTITATIVE DUAL ION BEAM PROCESS

Hentzell, H. T. G., Harper, J. M. E., Cuomo, J. J.

North-Holland
12 Conference Proceedings Demonstration of Deep (80 μm) RIE Etching of SiC for MEMS and MMIC Applications

Sheridan, D. C., Casady, J. B., Ellis, E. C., Siergiej, R. R., Cressler, J. D., Strong, R. M., Urban, W. M., Valek, W. …

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12