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Characterization and design optimization for CMOS-compatible MEMS

Author(s):
Publication title:
Materials and Device Characterization in Micromachining III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4175
Pub. Year:
2000
Page(from):
170
Page(to):
179
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438317 [0819438316]
Language:
English
Call no.:
P63600/4175
Type:
Conference Proceedings

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