Peel-off probe: a cost-effective probe for electrical atomic force microscopy
- Author(s):
- Publication title:
- Materials and Device Characterization in Micromachining III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4175
- Pub. Year:
- 2000
- Page(from):
- 50
- Page(to):
- 59
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438317 [0819438316]
- Language:
- English
- Call no.:
- P63600/4175
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
MRS - Materials Research Society |
4
Conference Proceedings
Fabrication of a full metal AFM probe and its applications for Si and InP device analysis
SPIE - The International Society for Optical Engineering |
10
Conference Proceedings
Micromachined probes for high-frequency scanning force microscopy and scanning thermal microscopy
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Characterization of silicon cantilevers with integrated pyramidal metal tips in atomic force microscopy
SPIE - The International Society for Optical Engineering |
11
Conference Proceedings
SSRM And SCM Observation Of Enhanced Lateral As- and BF2-Diffusion Induced By Nitride Spacers
Materials Research Society |
Electrochemical Society |
12
Conference Proceedings
SSRM and SCM Observation of Modified Lateral Diffusion of As, BF2 and Sb Induced by Nitride Spacers
Materials Research Society |