Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Author(s):

Witvrouw,A.

Publication title:

Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4174

Pub. Year:

2000

Page(from):

130

Page(to):

141

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819438300 [0819438308]

Language:

English

Call no.:

P63600/4174

Type:

Conference Proceedings

Details

TDL ID:	ZA00011893
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	2000 : 6th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2000.09.18-2000.09.20

Similar Items:

1 Conference Proceedings Characterization of (near) hermetic zero-level packages for MEMS (Invited Paper) De Moor, P., Baert, K., De Wolf, L., Jourdain, A., Tilman, H.A.C., Witvrouw, A., Van Hoof, C.A. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy Leonov, V.N., Perova, N.A., Moor, P.D., Bois, B.D., Goessens, C., Grietens, B., Verbist, A., Hoof, C.A.V., Vermeiren, … SPIE-The International Society for Optical Engineering
2 Conference Proceedings Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications Van der Donck, T., Proost, J., Rusu, C., Baert, K., Van Hoof, C., Celis, J.-P., Witvrouw, A. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Stress Analysis on Ultra Thin Ground Wafers R. C. Teixeira, K. DeMunck, P. DeMoor, K. Baert, B. Swinnen, C. Van Hoof, A. Kuttel Electrochemical Society
3 Conference Proceedings Alumina Porous Membranes Obtained by One-Step Anodizing Process in H₂SO₄ for MEMS Packaging R. Hellin Rico, J. Celis, B. Du Bois, C. Van Hoof, A. Witvrouw Electrochemical Society	9 Conference Proceedings Radiation-induced dark current increase in CMOS active pixel sensors Bogaerts,J., Dierickx,B., Hoof,C.A.Van SPIE-The International Society for Optical Engineering
4 Conference Proceedings A Novel Gap Narrowing Process for Creating High Aspect Ratio Transduction Gaps for MEM HF Resonators Steve Stoffels, George Bryce, Rita Van Hoof, Bert Du Bois, Robert Mertens, Robert Puers, Harrie A.C. Tilmans, Ann … Materials Research Society	10 Conference Proceedings Characteristics of residual products in HF gas-phase etching of sacrificial oxides for silicon micromachining Jang,W.-I., Choi,C.-A., Lee,C.-S., Hong,Y.-S., Lee,J.-H. SPIE - The International Society for Optical Engineering
5 Conference Proceedings CHARACTERIZATION OF SILICON OXIDE ETCHING IN HF VAPOR PROCESSES Han, Y.-P., Lawing, S., Sawin, H. Electrochemical Society	11 Conference Proceedings SIGEM, low-temperature deposition of poly-SiGe MEMS Structures on standard CMOS circuits (Invited Paper) Ramos-Martos, J., Ceballos-Caceres, J., Ragel-Morales, A., Mora-Gutierrez, J. M., Arias-Drake, A., Lagos-Florido, M. A., … SPIE - The International Society of Optical Engineering
6 Conference Proceedings COMPARISON OF VAPOR-PHASE AND WET CHEMICAL PRE-GATE OXIDE AND PRE-CONTACT CLEANS Draper, C.W., Anyanwu, V.E., Eisenberg, J.H., Felton, G.J., Roy, P.K., Chittipeddi, S., Bechtold, P.F., Hagner, G., … Electrochemical Society	12 Conference Proceedings Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs Leonov, V.N., Creten, Y., Moor, P.D., Bois, B.D., Goessens, C., Grietens, B., Merken, P., Perova, N.A., Ruttens, G., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12