Anisotropically etched Si molds for fabricating fine optical components
- Author(s):
- Publication title:
- Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4174
- Pub. Year:
- 2000
- Page(from):
- 77
- Page(to):
- 84
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438300 [0819438308]
- Language:
- English
- Call no.:
- P63600/4174
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
2
Conference Proceedings
The silicon mold fabrication of a kind of micro-optical resonator and coupler
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
3
Conference Proceedings
Si micromachining for optics: optical components and sensors (Invited Paper)
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Subwavelength antireflection structure for optical detector fabricated by fast atom beam etching
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Antireflection structures for visible and infrared wavelengths fabricated on silicon substrates by fast atom beam etching
SPIE - The International Society for Optical Engineering |
10
Conference Proceedings
Micro translation table for near-field data storage using inverted-scratch-drive actuators
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
High-aspect-ratio two-dimensional silicon subwavelength gratings fabricated by fast atom beam etching
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
6
Conference Proceedings
Optical components and actuators for integrated near-field optical data storage (Invited Paper)
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |