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Laser-pulse-induced chemical reactions and surface patterning in Co-Si and Co-Ti-Si films: investigations by x-ray diffraction and atomic force microscopy

Author(s):
Publication title:
Laser-Assisted Microtechnology 2000
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4157
Pub. Year:
2000
Page(from):
208
Page(to):
211
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438133 [0819438138]
Language:
English
Call no.:
P63600/4157
Type:
Conference Proceedings

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