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Optoelectronic methods for detecting a surface defect and extimation of their parameters by coherent illumination

Author(s):
Publication title:
Laser-Assisted Microtechnology 2000
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4157
Pub. Year:
2000
Page(from):
183
Page(to):
190
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438133 [0819438138]
Language:
English
Call no.:
P63600/4157
Type:
Conference Proceedings

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