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"Design, fabrication, and characterization of broadhand multilayer mirrors for EUV optics at normal incidence"

Author(s):
Wang,Z.
Kun,C.
Ma,Y.
Chen,B.
Cao,J.
Zhou,Z.
Chen,X.
Michette,A.G.
3 more
Publication title:
Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4146
Pub. Year:
2000
Page(from):
83
Page(to):
90
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437914 [0819437913]
Language:
English
Call no.:
P63600/4146
Type:
Conference Proceedings

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