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Controlling thin film thickness distrlbution in two dimensions

Author(s):
Publication title:
Advances in X-ray optics : 2-4 August 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4145
Pub. Year:
2001
Page(from):
80
Page(to):
87
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437907 [0819437905]
Language:
English
Call no.:
P63600/4145
Type:
Conference Proceedings

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