Development of an EUV reflectometer using a laser plasma x-ray source

Development of an EUV reflectometer using a laser plasma x-ray source

Author(s):

Kondo,H.

Publication title:

Advances in laboratory-based X-ray sources and optics : 31 July-1 August 2000, San Diego, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4144

Pub. Year:

2000

Page(from):

76

Page(to):

81

Pages:

6

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819437891 [0819437891]

Language:

English

Call no.:

P63600/4144

Type:

Conference Proceedings

Details

TDL ID:	ZA00011869
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Advances in Laboratory-Based X-Ray Sources and Optics
Conf. info. (Number):	2000
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2000.07.31-2000.08.01

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