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Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO2

Author(s):
Leng,J.
Li,S.
Opsal,J.L.
Aspnes,D.E.
Lee,B.H.
Lee,J.C.
1 more
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4099
Pub. Year:
2000
Page(from):
228
Page(to):
234
Pages:
7
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437440 [0819437441]
Language:
English
Call no.:
P63600/4099
Type:
Conference Proceedings

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