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Variable angle spectroscopic ellipsomefry in the vacuum ultraviolet

Author(s):
Woollam,J.A.
Hilfiker,J.N.
Tiwald,T.E.
Bungay,C.L.
Synowicki,R.A.
Meyer,D.E.
Herzinger,C.M.
Pfeiffer,G.L.
Cooney,G.T.
Green,S.E.
Co,J.A.Woollam
6 more
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4099
Pub. Year:
2000
Page(from):
197
Page(to):
205
Pages:
9
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437440 [0819437441]
Language:
English
Call no.:
P63600/4099
Type:
Conference Proceedings

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